The Ar flow rate effect on the electrical and optical properties of the sputtered Al-doped ZnO thins films were investigated. It was shown that a strong X-ray peak from (002) and (004) planes is dominant, suggesting that most grains have c-axis perpendicular to the substrate surface. The (002)-ZnO and (004)-ZnO peaks were measured at 2q = 34.120, and 71.850, respectively. It was also found that the growth rate of the Al-doped ZnO thin films increases when the sputtering power is increased. The transmittance of these film are strongly dependent on the sputtering power with the maximum transmittance of 92% was obtained at the sputtering power of 150 W and 50 sccm of Ar flow rate. The resistivity of the films is decreases as the Ar flow rate is increased. The lowest resistivity of 9.74 x 10-4 W.cm was obtained at the films with Ar flow rate of 80 sccm. The mobility increases with the Ar flow rate increases. The carrier concentration also indicates the same pattern as the mobility. The transmittance of Al-doped ZnO thin films is also strongly dependent on the Ar flow rate. It was also observed the variation of contact resistivity of Al/Ti/Al to Al-doped n-ZnO thin films. The speciï¬c contact resistivity rc of 1.8x10−5 W.cm2 was obtained at 150 nm-thick Al.
| Published by | Universitas Sebelas Maret |
| Journal Name | Journal of Electrical, Electronic, Information, and Communication Technology (JEEICT) |
| Contact Phone | +6282295313834 |
| Contact Name | Agus Ramelan |
| Contact Email | agusramelan@staff.uns.ac.id |
| Location | Kota surakarta, Jawa tengah INDONESIA |
| Website | jeeict| https://jurnal.uns.ac.id/jeeict| |
| ISSN | ISSN : -, EISSN : 27151263, DOI : https://dx.doi.org/10.20961/jeeict.2.2.45291, |
| Core Subject | Science, Engineering, |
| Meta Subject | Computer Science & IT, Control & Systems Engineering, Electrical & Electronics Engineering, |
| Meta Desc | Journal of Electrical, Electronic, Information and Communication Technology (JEEICT) is a peer-reviewed open-access journal in English published twice a year by the Department of Electrical Engineering, Sebelas Maret University, Indonesia. The JEEICT aims to provide a leading-edge medium for researchers, industry professionals, engineers, educators, students to disseminate research work and studies in the fields of electrical, electronics, information and communication technology. The journal publishes work from power systems, electronics, instrumentation, and biomedical engineering, renewable energy and its application, control systems, information technology, and communication and vehicular technology disciplinary, in theoretical and experimental perspectives. |
| Penulis | Adriyanto, Feri |
| Publisher Article | Universitas Sebelas Maret (UNS) |
| Subtitle Article | Journal of Electrical, Electronic, Information, and Communication Technology Vol 1, No 1 (2019): JOURNAL OF ELECTRICAL, ELECTRONIC, INFORMATION, AND COMMUNICATION TECHNOLOGY |
| Scholar Google | http://scholar.google.com/scholar?q=%2Bintitle%3A&… |
| View Article | https://jurnal.uns.ac.id/jeeic… |
| DOI | https://doi.org/10.20961/jeeict.v1i… |
| DOI Number | DOI: 10.20961/jeeict.v1i1.34767 |
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Informasi yang terkait dengan Ar flow rate effect for low resistivity Al/Ti/Al Ohmic contact to n ZnO thin films
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