A nanoelectromechanical systems mass spectrometer (NEMS-MS) is an instrument measuring the mass of analyte particles by detecting the frequency shift caused by the adsorption of the particles on a NEMS resonator.
NEMS-MS was invented by Prof. Michael Roukes and Dr. Kamil Ekinci at the California Institute of Technology in 1999.[1][2] First attainment of attogram-scale mass sensitivity was documented in their 2001 patent disclosure. Successive NEMS-MS sensitivity milestones were reported by the Caltech researchers in publications appearing in 2004 (attogram-scale sensitivity)[3] and in 2006 (zeptogram-scale sensitivity).[4] They later developed single molecule analysis in 2009.[5][6] Single-biomolecule mass measurements were first accomplished by this team in 2012.[7] A hybrid NEMS-MS/TOF-MS instrument was reported in 2015.[8]
^US disclosure 2009/0261241, Roukes and Kamil Ekinci, "Apparatus and method for ultra sensitive nano electromechanical mass detection", published 2001-05-04
^US issued 6,722,200 B2, Roukes and Kamil Ekinci, "Apparatus and method for ultra sensitive nano electromechanical mass detection", published 2004-04-20
^US application 2009/0261241, Roukes et al, "Single molecule mass spectroscopy enabled by nanoelectromechanical systems (nems-ms)", published 2009-10-22